Inventor
NAKAMURA KENRO
JP13 patents
⚠️ This page may combine multiple inventors who share the name “NAKAMURA KENRO”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
TOSHIBA KK
11 patentsUS6933234B2Aug 23, 2005
Method for manufacturing semiconductor device and polishing apparatus
TOSHIBA KK50 citations96
US7351131B2Apr 1, 2008
Method for manufacturing semiconductor device and polishing apparatus
TOSHIBA KK20 citations92
US7066787B2Jun 27, 2006
Substrate processing apparatus
TOSHIBA KK49 citations92
US6429134B1Aug 6, 2002
Method of manufacturing semiconductor device
TOSHIBA KK33 citations92
US6239032B1May 29, 2001
Polishing method
TOSHIBA KK18 citations84
US6620336B2Sep 16, 2003
Polishing pad, polishing apparatus and polishing method
TOSHIBA KK14 citations83
US6096631AAug 1, 2000
Method of manufacturing semiconductor device
TOSHIBA KK6 citations63
US9287225B2Mar 15, 2016
Semiconductor device and manufacturing method thereof
TOSHIBA KK2 citations62
US7354861B1Apr 8, 2008
Polishing method and polishing liquid
TOSHIBA KK3 citations62
US9673147B2Jun 6, 2017
Semiconductor device and manufacturing method thereof
TOSHIBA KK0 citations51
US9123717B2Sep 1, 2015
Semiconductor device manufacturing method and manufacturing apparatus
TOSHIBA KK0 citations51