Inventor
YODA TAKASHI
JP18 patents
⚠️ This page may combine multiple inventors who share the name “YODA TAKASHI”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
TOSHIBA KK
11 patentsUS6661088B1Dec 9, 2003
Semiconductor integrated circuit device having interposer and method of manufacturing the same
TOSHIBA KK81 citations97
US6933234B2Aug 23, 2005
Method for manufacturing semiconductor device and polishing apparatus
TOSHIBA KK50 citations96
US7351131B2Apr 1, 2008
Method for manufacturing semiconductor device and polishing apparatus
TOSHIBA KK20 citations92
US6812557B2Nov 2, 2004
Stacked type semiconductor device
TOSHIBA KK28 citations92
US5254872AOct 19, 1993
Semiconductor device and method of manufacturing the same
TOSHIBA KK26 citations92
US4876223AOct 24, 1989
Method of manufacturing semiconductor devices
TOSHIBA KK32 citations92
US6938638B2Sep 6, 2005
Gas circulating-processing apparatus
TOSHIBA KK13 citations84
US6828684B2Dec 7, 2004
Semiconductor device and method of manufacturing the same
TOSHIBA KK5 citations73
US6566261B2May 20, 2003
Semiconductor device and method of manufacturing the same
TOSHIBA KK8 citations73
US7202168B2Apr 10, 2007
Method of producing semiconductor device
TOSHIBA KK3 citations62
US6410439B1Jun 25, 2002
Semiconductor polishing apparatus and method for chemical/mechanical polishing of films
TOSHIBA KK1 citations52