Inventor
CHEN YUNG CHENG
TW35 patents
⚠️ This page may combine multiple inventors who share the name “CHEN YUNG CHENG”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
TAIWAN SEMICONDUCTOR MFG CO LTD
11 patentsUS9841687B2Dec 12, 2017
Synchronized integrated metrology for overlay-shift reduction
TAIWAN SEMICONDUCTOR MFG CO LTD28 citations94
US11003091B2May 11, 2021
Method of fabricating reticle
TAIWAN SEMICONDUCTOR MFG CO LTD1 citations72
US10534272B2Jan 14, 2020
Method of fabricating reticle
TAIWAN SEMICONDUCTOR MFG CO LTD1 citations72
US10073354B2Sep 11, 2018
Exposure method of wafer substrate, manufacturing method of semiconductor device, and exposure tool
TAIWAN SEMICONDUCTOR MFG CO LTD3 citations72
US11835866B2Dec 5, 2023
Method and system of surface topography measurement for lithography
TAIWAN SEMICONDUCTOR MFG CO LTD2 citations71
US11487210B1Nov 1, 2022
Method and system of surface topography measurement for lithography
TAIWAN SEMICONDUCTOR MFG CO LTD4 citations71
US12276906B2Apr 15, 2025
Methods for cleaning lithography mask
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations62
US11940737B2Mar 26, 2024
Method of fabricating reticle
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations62
US12429783B2Sep 30, 2025
EUV lithography apparatus and operating method for mitigating contamination
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations61
US12189306B2Jan 7, 2025
Method and system of surface topography measurement for lithography
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations61
US9513552B2Dec 6, 2016
Multiple-patterning photolithographic mask and method
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations51
CHEN YUNG CHENG
7 patentsUS7234557B2Jun 26, 2007
Electric vehicle with partitionable structure
CHEN YUNG CHENG40 citations92
US7221123B2May 22, 2007
Battery container for an electric vehicle
CHEN YUNG CHENG25 citations92
USD511720SNov 22, 2005
Electric scooter
CHEN YUNG CHENG19 citations92
USD509774SSep 20, 2005
Electric scooter
CHEN YUNG CHENG20 citations92
USD509775SSep 20, 2005
Electric scooter
CHEN YUNG CHENG7 citations73
US7104557B2Sep 12, 2006
Folding and positioning structure of the head tube for an electric vehicle
CHEN YUNG CHENG6 citations62
USD510893SOct 25, 2005
Electric scooter
CHEN YUNG CHENG1 citations51
TAIWAN SEMICONDUCTOR MFG
3 patentsUS7795601B2Sep 14, 2010
Method and apparatus to improve lithography throughput
TAIWAN SEMICONDUCTOR MFG4 citations62
US8986911B2Mar 24, 2015
Multiple-patterning photolithographic mask and method
TAIWAN SEMICONDUCTOR MFG2 citations61
US7789576B2Sep 7, 2010
PEB embedded exposure apparatus
TAIWAN SEMICONDUCTOR MFG1 citations50