P

Inventor

THOMPSON RAYMON F

US69 patents
⚠️ This page may combine multiple inventors who share the name “THOMPSON RAYMON F”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

SEMITOOL INC

46 patents
US6350319B1Feb 26, 2002

Micro-environment reactor for processing a workpiece

SEMITOOL INC88 citations99
US5544421AAug 13, 1996

Semiconductor wafer processing system

SEMITOOL INC107 citations99
US5377708AJan 3, 1995

Multi-station semiconductor processor with volatilization

SEMITOOL INC247 citations99
US5235995AAug 17, 1993

Semiconductor processor apparatus with dynamic wafer vapor treatment and particulate volatilization

SEMITOOL INC168 citations99
US5224503AJul 6, 1993

Centrifugal wafer carrier cleaning apparatus

SEMITOOL INC113 citations99
US5222310AJun 29, 1993

Single wafer processor with a frame

SEMITOOL INC219 citations99
US5431421AJul 11, 1995

Semiconductor processor wafer holder

SEMITOOL INC108 citations98
US5174045ADec 29, 1992

Semiconductor processor with extendible receiver for handling multiple discrete wafers without wafer carriers

SEMITOOL INC117 citations98
US6254742B1Jul 3, 2001

Diffuser with spiral opening pattern for an electroplating reactor vessel

SEMITOOL INC130 citations97
US5678320AOct 21, 1997

Semiconductor processing systems

SEMITOOL INC87 citations97
US5224504AJul 6, 1993

Single wafer processor

SEMITOOL INC200 citations97
US6423642B1Jul 23, 2002

Reactor for processing a semiconductor wafer

SEMITOOL INC78 citations96
US6014817AJan 18, 2000

Semiconductor wafer processing system

SEMITOOL INC43 citations96
US5738128AApr 14, 1998

Centrifugal wafer carrier cleaning apparatus

SEMITOOL INC42 citations96
US5660517AAug 26, 1997

Semiconductor processing system with wafer container docking and loading station

SEMITOOL INC84 citations96
US5562113AOct 8, 1996

Centrifugal wafer carrier cleaning apparatus

SEMITOOL INC38 citations96
US5445172AAug 29, 1995

Wafer holder with flexibly mounted gripping fingers

SEMITOOL INC73 citations96
US5232328AAug 3, 1993

Robot loadable centrifugal semiconductor processor with extendible rotor

SEMITOOL INC87 citations96
US5230743AJul 27, 1993

Method for single wafer processing in which a semiconductor wafer is contacted with a fluid

SEMITOOL INC123 citations96
US5168886ADec 8, 1992

Single wafer processor

SEMITOOL INC132 citations96
US5168887ADec 8, 1992

Single wafer processor apparatus

SEMITOOL INC73 citations96
US5156174AOct 20, 1992

Single wafer processor with a bowl

SEMITOOL INC77 citations96
US5022419AJun 11, 1991

Rinser dryer system

SEMITOOL INC99 citations96
US6413436B1Jul 2, 2002

Selective treatment of the surface of a microelectronic workpiece

SEMITOOL INC61 citations95
US6446643B2Sep 10, 2002

Micro-environment chamber and system for rinsing and drying a semiconductor workpiece

SEMITOOL INC24 citations93
US6318385B1Nov 20, 2001

Micro-environment chamber and system for rinsing and drying a semiconductor workpiece

SEMITOOL INC25 citations93
US5573023ANov 12, 1996

Single wafer processor apparatus

SEMITOOL INC34 citations93
US5221360AJun 22, 1993

Semiconductor processor methods

SEMITOOL INC49 citations93
US5154199AOct 13, 1992

Semiconductor processor draining

SEMITOOL INC40 citations93
US5095927AMar 17, 1992

Semiconductor processor gas-liquid separation

SEMITOOL INC48 citations93
US7138016B2Nov 21, 2006

Semiconductor processing apparatus

SEMITOOL INC31 citations92
US6794291B2Sep 21, 2004

Reactor for processing a semiconductor wafer

SEMITOOL INC13 citations92
US5996241ADec 7, 1999

Semiconductor wafer processing system with immersion module

SEMITOOL INC24 citations92
US5882168AMar 16, 1999

Semiconductor processing systems

SEMITOOL INC32 citations92
US5836736ANov 17, 1998

Semiconductor processing system with wafer container docking and loading station

SEMITOOL INC32 citations92
US5788454AAug 4, 1998

Semiconductor wafer processing system

SEMITOOL INC19 citations92
US5784802AJul 28, 1998

Semiconductor processing systems

SEMITOOL INC25 citations92
US4872638AOct 10, 1989

Slow acting fluid valve

SEMITOOL INC66 citations91
US5784797AJul 28, 1998

Carrierless centrifugal semiconductor processing system

SEMITOOL INC51 citations90
US6900132B2May 31, 2005

Single workpiece processing system

SEMITOOL INC22 citations88
US7354649B2Apr 8, 2008

Semiconductor workpiece

SEMITOOL INC13 citations84
US7288489B2Oct 30, 2007

Process for thinning a semiconductor workpiece

SEMITOOL INC13 citations84
US8028978B2Oct 4, 2011

Wafer handling system

SEMITOOL INC11 citations82
US6695914B2Feb 24, 2004

System for processing a workpiece

SEMITOOL INC10 citations82
US6833035B1Dec 21, 2004

Semiconductor processing system with wafer container docking and loading station

SEMITOOL INC12 citations74
US6666922B2Dec 23, 2003

System for processing a workpiece

SEMITOOL INC5 citations74

(unassigned)

2 patents

THOMPSON RAYMON F

1 patent

SEMITHERM

1 patent

Showing the top 50 of 69 patents by PatentIndex Score.