Inventor
THOMPSON RAYMON F
US69 patents
⚠️ This page may combine multiple inventors who share the name “THOMPSON RAYMON F”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
SEMITOOL INC
46 patentsUS6350319B1Feb 26, 2002
Micro-environment reactor for processing a workpiece
SEMITOOL INC88 citations99
US5544421AAug 13, 1996
Semiconductor wafer processing system
SEMITOOL INC107 citations99
US5377708AJan 3, 1995
Multi-station semiconductor processor with volatilization
SEMITOOL INC247 citations99
US5235995AAug 17, 1993
Semiconductor processor apparatus with dynamic wafer vapor treatment and particulate volatilization
SEMITOOL INC168 citations99
US5224503AJul 6, 1993
Centrifugal wafer carrier cleaning apparatus
SEMITOOL INC113 citations99
US5222310AJun 29, 1993
Single wafer processor with a frame
SEMITOOL INC219 citations99
US5431421AJul 11, 1995
Semiconductor processor wafer holder
SEMITOOL INC108 citations98
US5174045ADec 29, 1992
Semiconductor processor with extendible receiver for handling multiple discrete wafers without wafer carriers
SEMITOOL INC117 citations98
US6254742B1Jul 3, 2001
Diffuser with spiral opening pattern for an electroplating reactor vessel
SEMITOOL INC130 citations97
US5678320AOct 21, 1997
Semiconductor processing systems
SEMITOOL INC87 citations97
US5224504AJul 6, 1993
Single wafer processor
SEMITOOL INC200 citations97
US6423642B1Jul 23, 2002
Reactor for processing a semiconductor wafer
SEMITOOL INC78 citations96
US6014817AJan 18, 2000
Semiconductor wafer processing system
SEMITOOL INC43 citations96
US5738128AApr 14, 1998
Centrifugal wafer carrier cleaning apparatus
SEMITOOL INC42 citations96
US5660517AAug 26, 1997
Semiconductor processing system with wafer container docking and loading station
SEMITOOL INC84 citations96
US5562113AOct 8, 1996
Centrifugal wafer carrier cleaning apparatus
SEMITOOL INC38 citations96
US5445172AAug 29, 1995
Wafer holder with flexibly mounted gripping fingers
SEMITOOL INC73 citations96
US5232328AAug 3, 1993
Robot loadable centrifugal semiconductor processor with extendible rotor
SEMITOOL INC87 citations96
US5230743AJul 27, 1993
Method for single wafer processing in which a semiconductor wafer is contacted with a fluid
SEMITOOL INC123 citations96
US5168886ADec 8, 1992
Single wafer processor
SEMITOOL INC132 citations96
US5168887ADec 8, 1992
Single wafer processor apparatus
SEMITOOL INC73 citations96
US5156174AOct 20, 1992
Single wafer processor with a bowl
SEMITOOL INC77 citations96
US5022419AJun 11, 1991
Rinser dryer system
SEMITOOL INC99 citations96
US6413436B1Jul 2, 2002
Selective treatment of the surface of a microelectronic workpiece
SEMITOOL INC61 citations95
US6446643B2Sep 10, 2002
Micro-environment chamber and system for rinsing and drying a semiconductor workpiece
SEMITOOL INC24 citations93
US6318385B1Nov 20, 2001
Micro-environment chamber and system for rinsing and drying a semiconductor workpiece
SEMITOOL INC25 citations93
US5573023ANov 12, 1996
Single wafer processor apparatus
SEMITOOL INC34 citations93
US5221360AJun 22, 1993
Semiconductor processor methods
SEMITOOL INC49 citations93
US5154199AOct 13, 1992
Semiconductor processor draining
SEMITOOL INC40 citations93
US5095927AMar 17, 1992
Semiconductor processor gas-liquid separation
SEMITOOL INC48 citations93
US7138016B2Nov 21, 2006
Semiconductor processing apparatus
SEMITOOL INC31 citations92
US6794291B2Sep 21, 2004
Reactor for processing a semiconductor wafer
SEMITOOL INC13 citations92
US5996241ADec 7, 1999
Semiconductor wafer processing system with immersion module
SEMITOOL INC24 citations92
US5882168AMar 16, 1999
Semiconductor processing systems
SEMITOOL INC32 citations92
US5836736ANov 17, 1998
Semiconductor processing system with wafer container docking and loading station
SEMITOOL INC32 citations92
US5788454AAug 4, 1998
Semiconductor wafer processing system
SEMITOOL INC19 citations92
US5784802AJul 28, 1998
Semiconductor processing systems
SEMITOOL INC25 citations92
US4872638AOct 10, 1989
Slow acting fluid valve
SEMITOOL INC66 citations91
US5784797AJul 28, 1998
Carrierless centrifugal semiconductor processing system
SEMITOOL INC51 citations90
US6900132B2May 31, 2005
Single workpiece processing system
SEMITOOL INC22 citations88
US7354649B2Apr 8, 2008
Semiconductor workpiece
SEMITOOL INC13 citations84
US7288489B2Oct 30, 2007
Process for thinning a semiconductor workpiece
SEMITOOL INC13 citations84
US8028978B2Oct 4, 2011
Wafer handling system
SEMITOOL INC11 citations82
US6695914B2Feb 24, 2004
System for processing a workpiece
SEMITOOL INC10 citations82
US6833035B1Dec 21, 2004
Semiconductor processing system with wafer container docking and loading station
SEMITOOL INC12 citations74
US6666922B2Dec 23, 2003
System for processing a workpiece
SEMITOOL INC5 citations74
(unassigned)
2 patentsTHOMPSON RAYMON F
1 patentSEMITHERM
1 patentShowing the top 50 of 69 patents by PatentIndex Score.