Inventor
BERNER ROBERT W
US30 patents
Patents
30 patentsUS5544421AAug 13, 1996
Semiconductor wafer processing system
SEMITOOL INC107 citations99
US6203582B1Mar 20, 2001
Modular semiconductor workpiece processing tool
SEMITOOL INC154 citations98
US5731678AMar 24, 1998
Processing head for semiconductor processing machines
SEMITOOL INC120 citations98
US6440178B2Aug 27, 2002
Modular semiconductor workpiece processing tool
SEMITOOL INC82 citations97
US5678320AOct 21, 1997
Semiconductor processing systems
SEMITOOL INC87 citations97
US6120641ASep 19, 2000
Process architecture and manufacturing tool sets employing hard mask patterning for use in the manufacture of one or more metallization levels on a workpiece
SEMITOOL INC67 citations96
US6014817AJan 18, 2000
Semiconductor wafer processing system
SEMITOOL INC43 citations96
US6004440ADec 21, 1999
Cathode current control system for a wafer electroplating apparatus
SEMITOOL INC117 citations96
US5660517AAug 26, 1997
Semiconductor processing system with wafer container docking and loading station
SEMITOOL INC84 citations96
US6627051B2Sep 30, 2003
Cathode current control system for a wafer electroplating apparatus
SEMITOOL INC57 citations95
US6322674B1Nov 27, 2001
Cathode current control system for a wafer electroplating apparatus
SEMITOOL INC62 citations95
US5954911ASep 21, 1999
Semiconductor processing using vapor mixtures
SEMITOOL INC57 citations95
US6139703AOct 31, 2000
Cathode current control system for a wafer electroplating apparatus
SEMITOOL INC67 citations94
US7087143B1Aug 8, 2006
Plating system for semiconductor materials
SEMITOOL INC33 citations92
US5996241ADec 7, 1999
Semiconductor wafer processing system with immersion module
SEMITOOL INC24 citations92
US5882168AMar 16, 1999
Semiconductor processing systems
SEMITOOL INC32 citations92
US5836736ANov 17, 1998
Semiconductor processing system with wafer container docking and loading station
SEMITOOL INC32 citations92
US5788454AAug 4, 1998
Semiconductor wafer processing system
SEMITOOL INC19 citations92
US5784802AJul 28, 1998
Semiconductor processing systems
SEMITOOL INC25 citations92
US6843894B2Jan 18, 2005
Cathode current control system for a wafer electroplating apparatus
SEMITOOL INC24 citations91
US6319841B1Nov 20, 2001
Semiconductor processing using vapor mixtures
SEMITOOL INC16 citations91
US6162734ADec 19, 2000
Semiconductor processing using vapor mixtures
SEMITOOL INC32 citations91
US6001234ADec 14, 1999
Methods for plating semiconductor workpieces using a workpiece-engaging electrode assembly with sealing boot
SEMITOOL INC30 citations90
US5784797AJul 28, 1998
Carrierless centrifugal semiconductor processing system
SEMITOOL INC51 citations90
US6833035B1Dec 21, 2004
Semiconductor processing system with wafer container docking and loading station
SEMITOOL INC12 citations74
US7074246B2Jul 11, 2006
Modular semiconductor workpiece processing tool
SEMITOOL INC8 citations73
US6960257B2Nov 1, 2005
Semiconductor processing system with wafer container docking and loading station
SEMITOOL INC10 citations73
US6454926B1Sep 24, 2002
Semiconductor plating system workpiece support having workpiece-engaging electrode with submerged conductive current transfer areas
SEMITOOL INC10 citations73
US6461494B1Oct 8, 2002
Methods for plating semiconductor workpieces using a workpiece-engaging electrode assembly with sealing boot
SEMITOOL INC11 citations71
US6805778B1Oct 19, 2004
Contact assembly for supplying power to workpieces during electrochemical processing
SEMITOOL INC4 citations60