Inventor
CURTIS GARY L
US48 patents
⚠️ This page may combine multiple inventors who share the name “CURTIS GARY L”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
SEMITOOL INC
40 patentsUS6350319B1Feb 26, 2002
Micro-environment reactor for processing a workpiece
SEMITOOL INC88 citations99
US5544421AAug 13, 1996
Semiconductor wafer processing system
SEMITOOL INC107 citations99
US6447232B1Sep 10, 2002
Semiconductor wafer processing apparatus having improved wafer input/output handling system
SEMITOOL INC499 citations98
US5664337ASep 9, 1997
Automated semiconductor processing systems
SEMITOOL INC105 citations98
US5678320AOct 21, 1997
Semiconductor processing systems
SEMITOOL INC87 citations97
US6423642B1Jul 23, 2002
Reactor for processing a semiconductor wafer
SEMITOOL INC78 citations96
US6014817AJan 18, 2000
Semiconductor wafer processing system
SEMITOOL INC43 citations96
US5660517AAug 26, 1997
Semiconductor processing system with wafer container docking and loading station
SEMITOOL INC84 citations96
US6413436B1Jul 2, 2002
Selective treatment of the surface of a microelectronic workpiece
SEMITOOL INC61 citations95
US6395101B1May 28, 2002
Single semiconductor wafer processor
SEMITOOL INC68 citations95
US6632292B1Oct 14, 2003
Selective treatment of microelectronic workpiece surfaces
SEMITOOL INC62 citations94
US6712577B2Mar 30, 2004
Automated semiconductor processing system
SEMITOOL INC21 citations93
US6446643B2Sep 10, 2002
Micro-environment chamber and system for rinsing and drying a semiconductor workpiece
SEMITOOL INC24 citations93
US6318385B1Nov 20, 2001
Micro-environment chamber and system for rinsing and drying a semiconductor workpiece
SEMITOOL INC25 citations93
US6794291B2Sep 21, 2004
Reactor for processing a semiconductor wafer
SEMITOOL INC13 citations92
US6374837B2Apr 23, 2002
Single semiconductor wafer processor
SEMITOOL INC23 citations92
US5996241ADec 7, 1999
Semiconductor wafer processing system with immersion module
SEMITOOL INC24 citations92
US5882168AMar 16, 1999
Semiconductor processing systems
SEMITOOL INC32 citations92
US5836736ANov 17, 1998
Semiconductor processing system with wafer container docking and loading station
SEMITOOL INC32 citations92
US5788454AAug 4, 1998
Semiconductor wafer processing system
SEMITOOL INC19 citations92
US5784802AJul 28, 1998
Semiconductor processing systems
SEMITOOL INC25 citations92
US7399713B2Jul 15, 2008
Selective treatment of microelectric workpiece surfaces
SEMITOOL INC26 citations91
US5784797AJul 28, 1998
Carrierless centrifugal semiconductor processing system
SEMITOOL INC51 citations90
US7429537B2Sep 30, 2008
Methods and apparatus for rinsing and drying
SEMITOOL INC11 citations82
US6695914B2Feb 24, 2004
System for processing a workpiece
SEMITOOL INC10 citations82
US7080652B2Jul 25, 2006
Automated semiconductor processing systems
SEMITOOL INC8 citations74
US6871655B2Mar 29, 2005
Automated semiconductor processing systems
SEMITOOL INC5 citations74
US6833035B1Dec 21, 2004
Semiconductor processing system with wafer container docking and loading station
SEMITOOL INC12 citations74
US6666922B2Dec 23, 2003
System for processing a workpiece
SEMITOOL INC5 citations74
US6660098B2Dec 9, 2003
System for processing a workpiece
SEMITOOL INC4 citations74
US6622737B2Sep 23, 2003
Micro-environment chamber and system for rinsing and drying a semiconductor workpiece
SEMITOOL INC5 citations74
US6558470B2May 6, 2003
Reactor for processing a microelectronic workpiece
SEMITOOL INC6 citations74
US6494956B2Dec 17, 2002
System for processing a workpiece
SEMITOOL INC3 citations74
US6960257B2Nov 1, 2005
Semiconductor processing system with wafer container docking and loading station
SEMITOOL INC10 citations73
US6799932B2Oct 5, 2004
Semiconductor wafer processing apparatus
SEMITOOL INC11 citations73
US6692613B2Feb 17, 2004
Reactor for processing a semiconductor wafer
SEMITOOL INC11 citations73
US6652219B2Nov 25, 2003
Semiconductor wafer processing apparatus having improved wafer input/output handling system
SEMITOOL INC12 citations73
US6447633B1Sep 10, 2002
Reactor for processing a semiconductor wafer
SEMITOOL INC10 citations73
US6997988B2Feb 14, 2006
System for processing a workpiece
SEMITOOL INC1 citations63
US6599075B2Jul 29, 2003
Semiconductor wafer processing apparatus
SEMITOOL INC6 citations62
MINNESOTA MINING & MFG
3 patentsUS5247740ASep 28, 1993
Method and apparatus for cutting a keyway in a mill roll
MINNESOTA MINING & MFG15 citations80
US5439435AAug 8, 1995
Method for cutting a keyway in a mill roll
MINNESOTA MINING & MFG1 citations60
US5439335AAug 8, 1995
Apparatus for cutting a keyway in a mill roll
MINNESOTA MINING & MFG4 citations60