Inventor
BEACH ERIC W
US16 patents
Patents
16 patentsUS6734076B1May 11, 2004
Method for thin film resistor integration in dual damascene structure
TEXAS INSTRUMENTS INC30 citations91
US7403094B2Jul 22, 2008
Thin film resistor and dummy fill structure and method to improve stability and reduce self-heating
TEXAS INSTRUMENTS INC18 citations84
US7696603B2Apr 13, 2010
Back end thin film capacitor having both plates of thin film resistor material at single metallization layer
TEXAS INSTRUMENTS INC9 citations83
US7416951B2Aug 26, 2008
Thin film resistors integrated at two different metal interconnect levels of single die
TEXAS INSTRUMENTS INC16 citations83
US7345573B2Mar 18, 2008
Integration of thin film resistors having different TCRs into single die
TEXAS INSTRUMENTS INC10 citations83
US6872655B2Mar 29, 2005
Method of forming an integrated circuit thin film resistor
TEXAS INSTRUMENTS INC14 citations80
US7449783B2Nov 11, 2008
Nonlinear via arrays for resistors to reduce systematic circuit offsets
TEXAS INSTRUMENTS INC8 citations73
US7202533B1Apr 10, 2007
Thin film resistors integrated at a single metal interconnect level of die
TEXAS INSTRUMENTS INC7 citations72
US6818966B2Nov 16, 2004
Method and structure for controlling surface properties of dielectric layers in a thin film component for improved trimming
TEXAS INSTRUMENTS INC9 citations70
US7704871B2Apr 27, 2010
Integration of thin film resistors having different TCRs into single die
TEXAS INSTRUMENTS INC4 citations62
US7208388B2Apr 24, 2007
Thin film resistor head structure and method for reducing head resistivity variance
TEXAS INSTRUMENTS INC5 citations62
US6979637B2Dec 27, 2005
Method and structure for controlling surface properties of dielectric layers in a thin film component for improved trimming
TEXAS INSTRUMENTS INC2 citations59
US7964919B2Jun 21, 2011
Thin film resistors integrated at two different metal single die
TEXAS INSTRUMENTS INC1 citations51
US7807540B2Oct 5, 2010
Back end thin film capacitor having plates at thin film resistor and first metallization layer levels
TEXAS INSTRUMENTS INC0 citations51
US7005361B2Feb 28, 2006
Providing high precision resistance in an integrated circuit using a thin film resistor of controlled dimension
TEXAS INSTRUMENTS INC0 citations41
US7455448B2Nov 25, 2008
Rapid thermal anneal equipment and method using sichrome film
TEXAS INSTRUMENTS INC0 citations33