Inventor
HOYT ERIC L
US2 patents
Patents
2 patentsUS6818966B2Nov 16, 2004
Method and structure for controlling surface properties of dielectric layers in a thin film component for improved trimming
TEXAS INSTRUMENTS INC9 citations70
US6979637B2Dec 27, 2005
Method and structure for controlling surface properties of dielectric layers in a thin film component for improved trimming
TEXAS INSTRUMENTS INC2 citations59