Inventor

PERLOV VULF

US2 patents

⚠️ This page may combine multiple inventors who share the name “PERLOV VULF”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

NUTOOL INC

1 patent

US6589105B2Jul 8, 2003

Pad tensioning method and system in a bi-directional linear polisher

NUTOOL INC10 citations70

ASM NUTOOL INC

1 patent

US6908368B2Jun 21, 2005

Advanced Bi-directional linear polishing system and method

ASM NUTOOL INC0 citations48