Inventor
VAN DIJSSELDONK ANTONIUS J J
NL3 patents
Patents
3 patentsUS6593585B1Jul 15, 2003
Lithographic projection apparatus with positioning system for use with reflectors
ASML NETHERLANDS BV26 citations89
US6597434B2Jul 22, 2003
Lithographic apparatus, device manufacturing method, and device manufactured thereby
ASML NETHERLANDS BV20 citations86
US6765218B2Jul 20, 2004
Lithographic projection apparatus with positioning system for use with reflectors
ASML NETHERLANDS BV0 citations49