Inventor
MILES DONALD S
US9 patents
Patents
9 patentsUS6830980B2Dec 14, 2004
Semiconductor device fabrication methods for inhibiting carbon out-diffusion in wafers having carbon-containing regions
TEXAS INSTRUMENTS INC22 citations90
US7422967B2Sep 9, 2008
Method for manufacturing a semiconductor device containing metal silicide regions
TEXAS INSTRUMENTS INC15 citations82
US7029967B2Apr 18, 2006
Silicide method for CMOS integrated circuits
TEXAS INSTRUMENTS INC7 citations73
US6709938B2Mar 23, 2004
Source/drain extension fabrication process with direct implantation
TEXAS INSTRUMENTS INC4 citations62
US7335595B2Feb 26, 2008
Silicide formation using a low temperature anneal process
TEXAS INSTRUMENTS INC3 citations61
US7208409B2Apr 24, 2007
Integrated circuit metal silicide method
TEXAS INSTRUMENTS INC6 citations60
US6831008B2Dec 14, 2004
Nickel silicide—silicon nitride adhesion through surface passivation
TEXAS INSTRUMENTS INC5 citations60
US6737354B2May 18, 2004
Method of CMOS source/drain extension with the PMOS implant spaced by poly oxide and cap oxide from the gates
TEXAS INSTRUMENTS INC2 citations57
US6833292B2Dec 21, 2004
Reducing dopant losses during annealing processes
TEXAS INSTRUMENTS INC0 citations39