Inventor
HORIUCHI HIDETAKA
JP6 patents
⚠️ This page may combine multiple inventors who share the name “HORIUCHI HIDETAKA”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
KAWASAKI MICROELECTRONICS INC
3 patentsUS6558505B2May 6, 2003
Method and apparatus for processing semiconductor substrates
KAWASAKI MICROELECTRONICS INC41 citations94
US6447853B1Sep 10, 2002
Method and apparatus for processing semiconductor substrates
KAWASAKI MICROELECTRONICS INC39 citations94
US6547921B2Apr 15, 2003
Method and apparatus for processing semiconductor substrates
KAWASAKI MICROELECTRONICS INC17 citations91