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Inventor
LEE MI-JOUNG
KR
2 patents
Patents
2 patents
US7733099B2
Jun 8, 2010
Monitoring pattern for detecting a defect in a semiconductor device and method for detecting a defect
SAMSUNG ELECTRONICS CO LTD
6 citations
58
US7705621B2
Apr 27, 2010
Test pattern and method of monitoring defects using the same
SAMSUNG ELECTRONICS CO LTD
3 citations
56