Inventor
GROENSMIT FRANS ERIK
NL4 patents
Patents
4 patentsUS8149387B2Apr 3, 2012
Method of placing a substrate, method of transferring a substrate, support system and lithographic projection apparatus
ALBERTI JOZEF AUGUSTINUS MARIA8 citations79
US8086348B2Dec 27, 2011
Method of transferring a substrate, transfer system and lithographic projection apparatus
ALBERTI JOZEF AUGUSTINUS MARIA7 citations79
US8154709B2Apr 10, 2012
Method of placing a substrate, method of transferring a substrate, support system and lithographic projection apparatus
ALBERTI JOZEF AUGUSTINUS MARIA0 citations47
US8064045B2Nov 22, 2011
Method of transferring a substrate, transfer system and lithographic projection apparatus
ALBERTI JOZEF AUGUSTINUS MARIA0 citations37