Inventor
TERADA SHOUICHI
JP10 patents
⚠️ This page may combine multiple inventors who share the name “TERADA SHOUICHI”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
TOKYO ELECTRON LTD
7 patentsUS7910157B2Mar 22, 2011
Substrate processing method and program
TOKYO ELECTRON LTD12 citations83
US7757626B2Jul 20, 2010
Substrate processing apparatus and substrate processing method
TOKYO ELECTRON LTD8 citations82
US7968468B2Jun 28, 2011
Substrate treatment apparatus and substrate treatment method
TOKYO ELECTRON LTD4 citations62
US7926444B2Apr 19, 2011
Method for forming thin film and film-forming device
TOKYO ELECTRON LTD2 citations62
US7416474B2Aug 26, 2008
Planarization apparatus
TOKYO ELECTRON LTD4 citations62
US7316515B2Jan 8, 2008
Liquid processing apparatus processing a substrate surface with a processing liquid, liquid processing method, and liquid condition detection apparatus detecting fluctuation of the processing liquid
TOKYO ELECTRON LTD1 citations51
US7757625B2Jul 20, 2010
Method for forming thin film and film-forming device
TOKYO ELECTRON LTD0 citations41