Inventor

TABRIZI FARZAD

US6 patents

⚠️ This page may combine multiple inventors who share the name “TABRIZI FARZAD”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

MATTSON TECH INC

3 patents

US6315512B1Nov 13, 2001

Systems and methods for robotic transfer of workpieces between a storage area and a processing chamber

MATTSON TECH INC737 citations97

US6647665B1Nov 18, 2003

Door systems for low contamination, high throughput handling of workpieces for vacuum processing

MATTSON TECH INC58 citations94

US6568552B1May 27, 2003

Systems and methods for low contamination, high throughput handling of workpieces for vacuum processing

MATTSON TECH INC45 citations94

BARKER DAVID

1 patent

US7976263B2Jul 12, 2011

Integrated wafer transfer mechanism

BARKER DAVID10 citations82

DYNAMIC MICRO SYSTEMS

1 patent

US9728436B2Aug 8, 2017

Transfer mechanism with multiple wafer handling capability

DYNAMIC MICRO SYSTEMS5 citations71

TABRIZI FARZAD

1 patent

US8277165B2Oct 2, 2012

Transfer mechanism with multiple wafer handling capability

TABRIZI FARZAD4 citations56