Inventor

ORTH MATTHIAS

DE5 patents

⚠️ This page may combine multiple inventors who share the name “ORTH MATTHIAS”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

ZEISS CARL SMT GMBH

3 patents

US9341807B2May 17, 2016

Gravitation compensation for optical elements in projection exposure apparatuses

ZEISS CARL SMT GMBH3 citations71

US9513562B2Dec 6, 2016

Projection exposure apparatus for microlithography for the production of semiconductor components

ZEISS CARL SMT GMBH0 citations50

US10078271B2Sep 18, 2018

Optical component

ZEISS CARL SMT GMBH0 citations36

FISCHER JUERGEN

1 patent

US8885143B2Nov 11, 2014

Projection exposure apparatus for microlithography for the production of semiconductor components

FISCHER JUERGEN7 citations79

MUEHLBERGER NORBERT

1 patent

US8854603B2Oct 7, 2014

Gravitation compensation for optical elements in projection exposure apparatuses

MUEHLBERGER NORBERT1 citations44