Inventor
NAGAI TATSUO
JP11 patents
⚠️ This page may combine multiple inventors who share the name “NAGAI TATSUO”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
KURITA WATER IND LTD
3 patentsUS8038799B2Oct 18, 2011
Substrate processing apparatus and substrate processing method
KURITA WATER IND LTD6 citations62
US11345853B2May 31, 2022
Hydrophilization treatment method of polyphenylen sulfide resin
KURITA WATER IND LTD0 citations52
US9528079B2Dec 27, 2016
Substrate cleaning liquid and substrate cleaning method
KURITA WATER IND LTD1 citations51