Inventor

YAMAKAWA HARUYOSHI

JP5 patents

⚠️ This page may combine multiple inventors who share the name “YAMAKAWA HARUYOSHI”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

KURITA WATER IND LTD

2 patents

US10026628B2Jul 17, 2018

Semiconductor substrate cleaning method and cleaning system

KURITA WATER IND LTD2 citations69

US10056248B2Aug 21, 2018

Method for measuring overall concentration of oxidizing substances, substrate cleaning method, and substrate cleaning system

KURITA WATER IND LTD0 citations34

NAGAI TATSUO

1 patent

US9593424B2Mar 14, 2017

Sulfuric acid recycling type cleaning system and a sulfuric acid recycling type persulfuric acid supply apparatus

NAGAI TATSUO1 citations42

UCHIDA MINORU

1 patent

US9791169B2Oct 17, 2017

Liquid heater

UCHIDA MINORU0 citations39

OGAWA YUICHI

1 patent

US10032623B2Jul 24, 2018

Method and system for cleaning semiconductor substrate

OGAWA YUICHI0 citations38