Inventor
WATANABE SYOUZOU
JP9 patents
⚠️ This page may combine multiple inventors who share the name “WATANABE SYOUZOU”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
OKITA SHOGO
4 patentsUS8673166B2Mar 18, 2014
Plasma processing apparatus and plasma processing method
OKITA SHOGO17 citations82
US8231798B2Jul 31, 2012
Plasma processing apparatus and plasma processing method
OKITA SHOGO7 citations82
US8303765B2Nov 6, 2012
Plasma etching apparatus
OKITA SHOGO9 citations79
US8591754B2Nov 26, 2013
Plasma processing apparatus and plasma processing method
OKITA SHOGO1 citations60
PANASONIC IP MAN CO LTD
3 patentsUS11398372B2Jul 26, 2022
Plasma processing apparatus and plasma processing method
PANASONIC IP MAN CO LTD0 citations51
US9779986B2Oct 3, 2017
Plasma treatment method and method of manufacturing electronic component
PANASONIC IP MAN CO LTD1 citations51
US9786472B2Oct 10, 2017
Plasma processing apparatus and method for manufacturing electronic component
PANASONIC IP MAN CO LTD0 citations41