Inventor
MATSUSHITA KUNIMASA
JP4 patents
⚠️ This page may combine multiple inventors who share the name “MATSUSHITA KUNIMASA”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
EBARA CORP
3 patentsUS11911806B2Feb 27, 2024
Substrate cleaning device, abnormality determination method of substrate cleaning device, storage medium
EBARA CORP0 citations56
US11267097B2Mar 8, 2022
Non-transitory computer-readable storage medium storing a program of stretching operation of elastic membrane, method of stretching operation of elastic membrane, and polishing apparatus
EBARA CORP0 citations53
US9737973B2Aug 22, 2017
Substrate processing apparatus
EBARA CORP0 citations36