Inventor
LEE DONGHYUB
KR3 patents
Patents
3 patentsUS11490499B2Nov 1, 2022
Method of exposure using extreme ultraviolet and method of manufacturing a semiconductor device using the same
SAMSUNG ELECTRONICS CO LTD1 citations57
US12487532B2Dec 2, 2025
EUV collector inspection apparatus and inspection method
SAMSUNG ELECTRONICS CO LTD0 citations55
US11940620B2Mar 26, 2024
Method of cleaning collector of EUV light source system
SAMSUNG ELECTRONICS CO LTD0 citations43