Inventor
Rodrigues Silverst
IN6 patents
Patents
6 patentsUS11881384B2Jan 23, 2024
Monolithic modular microwave source with integrated process gas distribution
APPLIED MATERIALS INC2 citations71
US10780447B2Sep 22, 2020
Apparatus for controlling temperature uniformity of a showerhead
APPLIED MATERIALS INC4 citations71
US12191118B2Jan 7, 2025
Monolithic modular microwave source with integrated process gas distribution
APPLIED MATERIALS INC0 citations61
US12144090B2Nov 12, 2024
Monolithic modular microwave source with integrated temperature control
APPLIED MATERIALS INC0 citations61
US11564292B2Jan 24, 2023
Monolithic modular microwave source with integrated temperature control
APPLIED MATERIALS INC1 citations61
US12033835B2Jul 9, 2024
Modular microwave source with multiple metal housings
APPLIED MATERIALS INC0 citations60