Inventor
HOSODA MASAKI
JP12 patents
⚠️ This page may combine multiple inventors who share the name “HOSODA MASAKI”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
HITACHI HIGH TECH CORP
3 patentsUS7378668B2May 27, 2008
Method and apparatus for applying charged particle beam
HITACHI HIGH TECH CORP25 citations92
US7423274B2Sep 9, 2008
Electron beam writing system and electron beam writing method
HITACHI HIGH TECH CORP7 citations73
US7173262B2Feb 6, 2007
Charged particle beam exposure apparatus, charged particle beam exposure method and device manufacturing method
HITACHI HIGH TECH CORP8 citations73