Inventor
SOMEDA YASUHIRO
JP31 patents
⚠️ This page may combine multiple inventors who share the name “SOMEDA YASUHIRO”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
HITACHI LTD
13 patentsUS6121625ASep 19, 2000
Charged particle beam lithography apparatus for forming pattern on semi-conductor
HITACHI LTD30 citations96
US6511048B1Jan 28, 2003
Electron beam lithography apparatus and pattern forming method
HITACHI LTD20 citations92
US5650631AJul 22, 1997
Electron beam writing system
HITACHI LTD22 citations92
US5396077AMar 7, 1995
Electron beam lithography apparatus having electron optics correction system
HITACHI LTD24 citations92
US6441383B1Aug 27, 2002
Charged particle beam lithography apparatus for forming pattern on semi-conductor
HITACHI LTD6 citations74
US6320198B1Nov 20, 2001
Charged particle beam lithography apparatus for forming pattern on semi-conductor
HITACHI LTD4 citations74
US6262428B1Jul 17, 2001
Charged particle beam lithography apparatus for forming pattern on semi-conductor
HITACHI LTD6 citations74
US5831273ANov 3, 1998
Charged particle beam lithography method and apparatus thereof
HITACHI LTD16 citations74
US5759423AJun 2, 1998
Electron beam writing method and apparatus for carrying out the same
HITACHI LTD9 citations73
US6555833B2Apr 29, 2003
Charged particle beam lithography apparatus for forming pattern on semi-conductor
HITACHI LTD1 citations63
US6583431B2Jun 24, 2003
Charged particle beam lithography apparatus for forming pattern on semi-conductor
HITACHI LTD0 citations52
US6509572B2Jan 21, 2003
Charged particle beam lithography apparatus for forming pattern on semi-conductor
HITACHI LTD0 citations52
US6329665B1Dec 11, 2001
Charged particle beam lithography apparatus for forming pattern on semi-conductor
HITACHI LTD0 citations52
CANON KK
7 patentsUS6730916B1May 4, 2004
Electron beam lithography apparatus
CANON KK28 citations92
US11357407B2Jun 14, 2022
Photoacoustic apparatus
CANON KK2 citations73
US10561396B2Feb 18, 2020
Ultrasonic probe, and photoacoustic-ultrasonic system and inspection object imaging apparatus including the ultrasonic probe
CANON KK1 citations73
US10413193B2Sep 17, 2019
Photoacoustic apparatus
CANON KK1 citations73
US9693753B2Jul 4, 2017
Ultrasonic probe, and photoacoustic-ultrasonic system and inspection object imaging apparatus including the ultrasonic probe
CANON KK4 citations73
US7341393B2Mar 11, 2008
Mechanism for sealing
CANON KK3 citations59
US10455664B2Oct 22, 2019
Analyte-information acquisition apparatus
CANON KK0 citations52
HITACHI HIGH TECH CORP
3 patentsUS7378668B2May 27, 2008
Method and apparatus for applying charged particle beam
HITACHI HIGH TECH CORP25 citations92
US7408760B2Aug 5, 2008
Charged particle beam application system
HITACHI HIGH TECH CORP21 citations91
US7425714B2Sep 16, 2008
Measurement method of electron beam current, electron beam writing system and electron beam detector
HITACHI HIGH TECH CORP12 citations84
SOMEDA YASUHIRO
3 patentsUS8997571B2Apr 7, 2015
Ultrasonic probe, and photoacoustic-ultrasonic system and inspection object imaging apparatus including the ultrasonic probe
SOMEDA YASUHIRO7 citations82
US9689974B2Jun 27, 2017
Image forming method using ultrasound and aberration correction method
SOMEDA YASUHIRO2 citations61
US9226662B2Jan 5, 2016
Photoacoustic apparatus
SOMEDA YASUHIRO2 citations61