P

Inventor

SOMEDA YASUHIRO

JP31 patents
⚠️ This page may combine multiple inventors who share the name “SOMEDA YASUHIRO”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

HITACHI LTD

13 patents
US6121625ASep 19, 2000

Charged particle beam lithography apparatus for forming pattern on semi-conductor

HITACHI LTD30 citations96
US6511048B1Jan 28, 2003

Electron beam lithography apparatus and pattern forming method

HITACHI LTD20 citations92
US5650631AJul 22, 1997

Electron beam writing system

HITACHI LTD22 citations92
US5396077AMar 7, 1995

Electron beam lithography apparatus having electron optics correction system

HITACHI LTD24 citations92
US6441383B1Aug 27, 2002

Charged particle beam lithography apparatus for forming pattern on semi-conductor

HITACHI LTD6 citations74
US6320198B1Nov 20, 2001

Charged particle beam lithography apparatus for forming pattern on semi-conductor

HITACHI LTD4 citations74
US6262428B1Jul 17, 2001

Charged particle beam lithography apparatus for forming pattern on semi-conductor

HITACHI LTD6 citations74
US5831273ANov 3, 1998

Charged particle beam lithography method and apparatus thereof

HITACHI LTD16 citations74
US5759423AJun 2, 1998

Electron beam writing method and apparatus for carrying out the same

HITACHI LTD9 citations73
US6555833B2Apr 29, 2003

Charged particle beam lithography apparatus for forming pattern on semi-conductor

HITACHI LTD1 citations63
US6583431B2Jun 24, 2003

Charged particle beam lithography apparatus for forming pattern on semi-conductor

HITACHI LTD0 citations52
US6509572B2Jan 21, 2003

Charged particle beam lithography apparatus for forming pattern on semi-conductor

HITACHI LTD0 citations52
US6329665B1Dec 11, 2001

Charged particle beam lithography apparatus for forming pattern on semi-conductor

HITACHI LTD0 citations52

CANON KK

7 patents

HITACHI HIGH TECH CORP

3 patents

SOMEDA YASUHIRO

3 patents

TOKITA TOSHINOBU

2 patents

FUKUTANI KAZUHIKO

1 patent

OIKAWA KATSUYA

1 patent

SHIINA TSUYOSHI

1 patent