Inventor
HONGO TOSHIAKI
JP6 patents
⚠️ This page may combine multiple inventors who share the name “HONGO TOSHIAKI”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
TOKYO ELECTRON LTD
5 patentsUS6372084B2Apr 16, 2002
Plasma processing apparatus with a dielectric plate having a thickness based on a wavelength of a microwave introduced into a process chamber through the dielectric plate
TOKYO ELECTRON LTD42 citations91
US6729261B2May 4, 2004
Plasma processing apparatus
TOKYO ELECTRON LTD21 citations89
US7629033B2Dec 8, 2009
Plasma processing method for forming a silicon nitride film on a silicon oxide film
TOKYO ELECTRON LTD11 citations82
US6656322B2Dec 2, 2003
Plasma processing apparatus
TOKYO ELECTRON LTD17 citations82
US6428661B1Aug 6, 2002
Plating apparatus
TOKYO ELECTRON LTD1 citations49