Inventor
SUGAYA MASAKAZU
JP23 patents
⚠️ This page may combine multiple inventors who share the name “SUGAYA MASAKAZU”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
HITACHI LTD
17 patentsUS6717156B2Apr 6, 2004
Beam as well as method and equipment for specimen fabrication
HITACHI LTD109 citations98
US6518548B2Feb 11, 2003
Substrate temperature control system and method for controlling temperature of substrate
HITACHI LTD269 citations98
US6394797B1May 28, 2002
Substrate temperature control system and method for controlling temperature of substrate
HITACHI LTD182 citations98
US6687013B2Feb 3, 2004
Laser interferometer displacement measuring system, exposure apparatus, and electron beam lithography apparatus
HITACHI LTD15 citations92
US9850696B2Dec 26, 2017
Microparticle detection device and security gate
HITACHI LTD4 citations73
US9696288B2Jul 4, 2017
Attached matter testing device and testing method
HITACHI LTD3 citations73
US9261437B2Feb 16, 2016
Attached matter inspection device
HITACHI LTD4 citations73
US6839142B2Jan 4, 2005
Laser interferometer displacement measuring system, exposure apparatus, and electron beam lithography apparatus
HITACHI LTD8 citations73
US9417163B2Aug 16, 2016
Analyzer for substance
HITACHI LTD2 citations63
US9214324B2Dec 15, 2015
Analysis device and analysis method
HITACHI LTD3 citations62
US10945684B2Mar 16, 2021
Ultrasonic CT device
HITACHI LTD0 citations51
US10138450B2Nov 27, 2018
Cell culture device
HITACHI LTD1 citations51
US10087410B2Oct 2, 2018
Cell culturing device, culturing vessel, and holding vessel
HITACHI LTD0 citations50
US9423388B2Aug 23, 2016
Particle analyzing device
HITACHI LTD1 citations49
US10048172B2Aug 14, 2018
Substance-testing apparatus, substance-testing system, and substance-testing method
HITACHI LTD0 citations41
US10184100B2Jan 22, 2019
Liquid delivery device and cell culture device using same
HITACHI LTD0 citations40
US10329525B2Jun 25, 2019
Liquid feeding device and cell culture device
HITACHI LTD0 citations39