Inventor
MURASATO NAOKI
JP9 patents
Patents
9 patentsUS11656547B2May 23, 2023
Imprint apparatus, imprinting method, and product manufacturing method
CANON KK2 citations71
US7116500B2Oct 3, 2006
Optical element holding system, barrel, exposure apparatus, and device manufacturing method
CANON KK10 citations70
US7031082B2Apr 18, 2006
Retainer, exposure apparatus, and device fabrication method
CANON KK7 citations70
US7345834B2Mar 18, 2008
Optical element holding system, barrel, exposure apparatus, and device manufacturing method
CANON KK3 citations59
US11426906B2Aug 30, 2022
Imprint apparatus, imprint method, and article manufacturing method
CANON KK0 citations50
US11187977B2Nov 30, 2021
Imprint apparatus, imprint method, and method of manufacturing article
CANON KK0 citations50
US10828805B2Nov 10, 2020
Imprint apparatus, control method, and method for manufacturing article
CANON KK0 citations49
US7907358B2Mar 15, 2011
Holding apparatus and exposure apparatus
CANON KK0 citations49
US10409156B2Sep 10, 2019
Mold, imprint apparatus, and method of manufacturing article
CANON KK0 citations41