Inventor
LALBAHADOERSING SANJAY
NL3 patents
Patents
3 patentsUS7330261B2Feb 12, 2008
Marker structure for optical alignment of a substrate, a substrate including such a marker structure, an alignment method for aligning to such a marker structure, and a lithographic projection apparatus
ASML NETHERLANDS BV19 citations91
US7619738B2Nov 17, 2009
Marker structure for optical alignment of a substrate, a substrate including such a marker structure, an alignment method for aligning to such a marker structure, and a lithographic projection apparatus
ASML NETHERLANDS BV4 citations72
US7355675B2Apr 8, 2008
Method for measuring information about a substrate, and a substrate for use in a lithographic apparatus
ASML NETHERLANDS BV3 citations53