Inventor

VAN DE VIN COEN

NL2 patents

Patents

2 patents

US7355675B2Apr 8, 2008

Method for measuring information about a substrate, and a substrate for use in a lithographic apparatus

ASML NETHERLANDS BV3 citations53

US7209214B2Apr 24, 2007

Lithographic apparatus focus test method and system, and device manufacturing method

ASML NETHERLANDS BV0 citations40