Inventor

ISHISAKA MITSUNORI

JP6 patents

⚠️ This page may combine multiple inventors who share the name “ISHISAKA MITSUNORI”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

HITACHI INT ELECTRIC INC

2 patents

US10604839B2Mar 31, 2020

Substrate processing apparatus, method of manufacturing semiconductor device, and method of processing substrate

HITACHI INT ELECTRIC INC1 citations61

US7842160B2Nov 30, 2010

Semiconductor producing device and semiconductor device producing method

HITACHI INT ELECTRIC INC5 citations60

ISHISAKA MITSUNORI

2 patents

US8197638B2Jun 12, 2012

Semiconductor manufacturing device and method for manufacturing semiconductor devices

ISHISAKA MITSUNORI3 citations56

US9142435B2Sep 22, 2015

Substrate stage of substrate processing apparatus and substrate processing apparatus

ISHISAKA MITSUNORI0 citations33

KOKUSAI ELECTRIC CORP

1 patent

US11685992B2Jun 27, 2023

Substrate processing apparatus, quartz reaction tube and method of manufacturing semiconductor device

KOKUSAI ELECTRIC CORP2 citations72

KASANAMI KATSUHISA

1 patent

US8906161B2Dec 9, 2014

Semiconductor producing device and semiconductor device producing method

KASANAMI KATSUHISA4 citations65