Inventor
O'BRIEN KEVIN MICHAEL
US9 patents
⚠️ This page may combine multiple inventors who share the name “O'BRIEN KEVIN MICHAEL”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
Cymer LLC
5 patentsUS11526083B2Dec 13, 2022
Spectral feature selection and pulse timing control of a pulsed light beam
Cymer LLC2 citations71
US9762023B2Sep 12, 2017
Online calibration for repetition rate dependent performance variables
Cymer LLC3 citations71
US11768438B2Sep 26, 2023
Spectral feature selection and pulse timing control of a pulsed light beam
Cymer LLC0 citations61
US11050213B2Jun 29, 2021
Online calibration for repetition rate dependent performance variables
Cymer LLC0 citations60
US10727642B2Jul 28, 2020
Online calibration for repetition rate dependent performance variables
Cymer LLC0 citations50