Inventor
FRÖHLICH HEIKO
DE3 patents
Patents
3 patentsUS9330929B1May 3, 2016
Systems and methods for horizontal integration of acceleration sensor structures
INFINEON TECHNOLOGIES DRESDEN GMBH8 citations81
US9546923B2Jan 17, 2017
Sensor structures, systems and methods with improved integration and optimized footprint
INFINEON TECHNOLOGIES DRESDEN GMBH3 citations71
US9136136B2Sep 15, 2015
Method and structure for creating cavities with extreme aspect ratios
INFINEON TECHNOLOGIES DRESDEN GMBH0 citations50