Inventor

LEE BEN MAI PAK

US3 patents

Patents

3 patents

US9468872B2Oct 18, 2016

Purification system with manifold assembly and removable filter cassette

ENTEGRIS INC4 citations68

US9802142B2Oct 31, 2017

Purifier cassette

ENTEGRIS INC3 citations62

US9943789B2Apr 17, 2018

Modular filter cassette

ENTEGRIS INC1 citations44