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Inventor
BARROWS JR LOUIS
US
2 patents
Patents
2 patents
US9468872B2
Oct 18, 2016
Purification system with manifold assembly and removable filter cassette
ENTEGRIS INC
4 citations
68
US9943789B2
Apr 17, 2018
Modular filter cassette
ENTEGRIS INC
1 citations
44