Inventor
NISHINAKA HIROYUKI
JP12 patents
⚠️ This page may combine multiple inventors who share the name “NISHINAKA HIROYUKI”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
NAGAOKA TATSUJI
6 patentsUS11515146B2Nov 29, 2022
Method of forming gallium oxide film
NAGAOKA TATSUJI0 citations60
US11424322B2Aug 23, 2022
Semiconductor device and method of manufacturing the same
NAGAOKA TATSUJI0 citations60
US11270882B2Mar 8, 2022
Film formation apparatus configured to supply mist of a solution to surface of a substrate and method of manufacturing semiconductor device using the film formation apparatus
NAGAOKA TATSUJI0 citations60
US11534791B2Dec 27, 2022
Mist generator, film formation apparatus, and method of forming film using the film formation apparatus
NAGAOKA TATSUJI0 citations50
US11443944B2Sep 13, 2022
Method of growing semiconductor layers, method of manufacturing semiconductor device, and method of growing balk crystal
NAGAOKA TATSUJI0 citations50
US11280023B2Mar 22, 2022
Film formation apparatus and method of manufacturing semiconductor device
NAGAOKA TATSUJI0 citations50
DENSO CORP
4 patentsUS11371161B2Jun 28, 2022
Method of forming oxide film, method of manufacturing semiconductor device, and film forming apparatus configured to form oxide film
DENSO CORP0 citations61
US11373864B2Jun 28, 2022
Method of forming oxide film, method of manufacturing semiconductor device, and apparatus configured to form oxide film
DENSO CORP0 citations61
US11142842B2Oct 12, 2021
Film formation apparatus and film formation method
DENSO CORP0 citations49
US11699600B2Jul 11, 2023
Wafer processing apparatus and method for processing wafer
DENSO CORP0 citations47