Inventor
IP NATHAN
US9 patents
Patents
9 patentsUS10622233B2Apr 14, 2020
Amelioration of global wafer distortion based on determination of localized distortions of a semiconductor wafer
TOKYO ELECTRON LTD14 citations83
US11335607B2May 17, 2022
Apparatus and methods for wafer to wafer bonding
TOKYO ELECTRON LTD6 citations71
US11244873B2Feb 8, 2022
Systems and methods for manufacturing microelectronic devices
TOKYO ELECTRON LTD0 citations61
US11435393B2Sep 6, 2022
Enhancement of yield of functional microelectronic devices
TOKYO ELECTRON LTD0 citations60
US11346882B2May 31, 2022
Enhancement of yield of functional microelectronic devices
TOKYO ELECTRON LTD1 citations60
US11594431B2Feb 28, 2023
Wafer bonding apparatus and methods to reduce post-bond wafer distortion
TOKYO ELECTRON LTD0 citations59
US11574808B2Feb 7, 2023
Plasma processing method and plasma processing apparatus
TOKYO ELECTRON LTD0 citations56
US12479070B2Nov 25, 2025
Wafer chuck with tunable stiffness material
TOKYO ELECTRON LTD0 citations51
US11868119B2Jan 9, 2024
Method and process using fingerprint based semiconductor manufacturing process fault detection
TOKYO ELECTRON LTD0 citations46