Inventor
LIU KUO-AN
TW14 patents
Patents
14 patentsUS11768437B2Sep 26, 2023
System and method for performing extreme ultraviolet photolithography processes
TAIWAN SEMICONDUCTOR MFG CO LTD2 citations72
US11392040B2Jul 19, 2022
System and method for performing extreme ultraviolet photolithography processes
TAIWAN SEMICONDUCTOR MFG CO LTD4 citations72
US10510866B1Dec 17, 2019
Semiconductor structure and fabrication method thereof
TAIWAN SEMICONDUCTOR MFG CO LTD2 citations71
US12218074B2Feb 4, 2025
DC and AC magnetic field protection for MRAM device using magnetic-field-shielding structure
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations62
US12174545B2Dec 24, 2024
System and method for performing extreme ultraviolet photolithography processes
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations62
US11715702B2Aug 1, 2023
DC and AC magnetic field protection for MRAM device using magnetic-field-shielding structure
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations62
US11139341B2Oct 5, 2021
Protection of MRAM from external magnetic field using magnetic-field-shielding structure
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations62
US11088083B2Aug 10, 2021
DC and AC magnetic field protection for MRAM device using magnetic-field-shielding structure
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations62
US12183805B2Dec 31, 2024
Semiconductor device and manufacturing method thereof
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations61
US11075282B2Jul 27, 2021
Semiconductor structure and fabrication method thereof
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations61
US11024721B2Jun 1, 2021
Semiconductor device and manufacturing method thereof
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations61
US10871647B2Dec 22, 2020
Apparatus and method for prevention of contamination on collector of extreme ultraviolet light source
TAIWAN SEMICONDUCTOR MFG CO LTD1 citations61
US12087714B2Sep 10, 2024
Reduction of cracks in passivation layer
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations50
US12432954B2Sep 30, 2025
Semiconductor device structure with fin and method for forming the same
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations48