Inventor
PULICHERLA BHARATH KUMAR
TW5 patents
Patents
5 patentsUS10510866B1Dec 17, 2019
Semiconductor structure and fabrication method thereof
TAIWAN SEMICONDUCTOR MFG CO LTD2 citations71
US12183805B2Dec 31, 2024
Semiconductor device and manufacturing method thereof
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations61
US11075282B2Jul 27, 2021
Semiconductor structure and fabrication method thereof
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations61
US11024721B2Jun 1, 2021
Semiconductor device and manufacturing method thereof
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations61
US10871647B2Dec 22, 2020
Apparatus and method for prevention of contamination on collector of extreme ultraviolet light source
TAIWAN SEMICONDUCTOR MFG CO LTD1 citations61