Inventor
KABA HIROMICHI
JP11 patents
Patents
11 patentsUS11521881B2Dec 6, 2022
Substrate treating apparatus
SCREEN HOLDINGS CO LTD2 citations70
US10777404B2Sep 15, 2020
Substrate processing apparatus
SCREEN HOLDINGS CO LTD4 citations70
US10192771B2Jan 29, 2019
Substrate holding/rotating device, substrate processing apparatus including the same, and substrate processing method
SCREEN HOLDINGS CO LTD4 citations69
US11850623B2Dec 26, 2023
Substrate treating apparatus and substrate transporting method
SCREEN HOLDINGS CO LTD1 citations60
US11031235B2Jun 8, 2021
Substrate processing apparatus
SCREEN HOLDINGS CO LTD0 citations60
US11948823B2Apr 2, 2024
Substrate treating apparatus
SCREEN HOLDINGS CO LTD0 citations59
US12581911B2Mar 17, 2026
Substrate processing apparatus
SCREEN HOLDINGS CO LTD0 citations49
US12496622B2Dec 16, 2025
Substrate processing apparatus
SCREEN HOLDINGS CO LTD0 citations49
US12083563B2Sep 10, 2024
Substrate treating apparatus
SCREEN HOLDINGS CO LTD0 citations49
US11764055B2Sep 19, 2023
Substrate processing method and substrate processing device
SCREEN HOLDINGS CO LTD0 citations49
US9892955B2Feb 13, 2018
Substrate holding/rotating device, substrate processing apparatus including the same, and substrate processing method
SCREEN HOLDINGS CO LTD0 citations38