Inventor
UENO AKIHISA
US4 patents
⚠️ This page may combine multiple inventors who share the name “UENO AKIHISA”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
LSI LOGIC CORP
3 patentsUS6503828B1Jan 7, 2003
Process for selective polishing of metal-filled trenches of integrated circuit structures
LSI LOGIC CORP21 citations91
US6417093B1Jul 9, 2002
Process for planarization of metal-filled trenches of integrated circuit structures by forming a layer of planarizable material over the metal layer prior to planarizing
LSI LOGIC CORP52 citations91
US6340434B1Jan 22, 2002
Method and apparatus for chemical-mechanical polishing
LSI LOGIC CORP41 citations87