Inventor
YO SHOJI
JP3 patents
Patents
3 patentsUS6828207B2Dec 7, 2004
Method of Fabricating a capacitor structure having hemispherical grains
OKI ELECTRIC IND CO LTD3 citations60
US6589885B2Jul 8, 2003
Semiconductor device and method in which contact hole is filled with silicon having low impurity concentration
OKI ELECTRIC IND CO LTD2 citations54
US7052955B2May 30, 2006
Semiconductor memory device and manufacturing method thereof
OKI ELECTRIC IND CO LTD0 citations43