Inventor
BROOKS CYNTHIA B
US7 patents
⚠️ This page may combine multiple inventors who share the name “BROOKS CYNTHIA B”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
APPLIED MATERIALS INC
5 patentsUS5786276AJul 28, 1998
Selective plasma etching of silicon nitride in presence of silicon or silicon oxides using mixture of CH3F or CH2F2 and CF4 and O2
APPLIED MATERIALS INC317 citations95
US7250309B2Jul 31, 2007
Integrated phase angle and optical critical dimension measurement metrology for feed forward and feedback process control
APPLIED MATERIALS INC39 citations92
US6355557B2Mar 12, 2002
Oxide plasma etching process with a controlled wineglass shape
APPLIED MATERIALS INC27 citations87
US6960413B2Nov 1, 2005
Multi-step process for etching photomasks
APPLIED MATERIALS INC6 citations71
US7371485B2May 13, 2008
Multi-step process for etching photomasks
APPLIED MATERIALS INC1 citations49