Inventor

OJIMA YUKI

JP4 patents

⚠️ This page may combine multiple inventors who share the name “OJIMA YUKI”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

HITACHI HIGH TECH CORP

2 patents

US6929892B2Aug 16, 2005

Method of monitoring an exposure process

HITACHI HIGH TECH CORP25 citations92

US7723681B2May 25, 2010

Observation method with electron beam

HITACHI HIGH TECH CORP0 citations49

YAMAZAKI MINORU

2 patents

US8080790B2Dec 20, 2011

Scanning electron microscope

YAMAZAKI MINORU7 citations82

US8487253B2Jul 16, 2013

Scanning electron microscope

YAMAZAKI MINORU0 citations50