P

Inventor

KUNST RONALD CASPER

NL9 patents
⚠️ This page may combine multiple inventors who share the name “KUNST RONALD CASPER”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

ASML NETHERLANDS BV

5 patents
US7782446B2Aug 24, 2010

Stage system and lithographic apparatus comprising such stage system

ASML NETHERLANDS BV13 citations83
US7256866B2Aug 14, 2007

Lithographic apparatus and device manufacturing method

ASML NETHERLANDS BV11 citations83
US7742149B2Jun 22, 2010

Stage system and lithographic apparatus comprising such a stage system

ASML NETHERLANDS BV15 citations82
US7657334B2Feb 2, 2010

Lithographic apparatus and control method

ASML NETHERLANDS BV3 citations60
US7379156B2May 27, 2008

Lithographic apparatus and device manufacturing method

ASML NETHERLANDS BV5 citations57

VERVOORDELDONK MICHAEL JOHANNES

1 patent
US8885147B2Nov 11, 2014

Lithographic apparatus and device manufacturing method

VERVOORDELDONK MICHAEL JOHANNES5 citations68

DE METSENAERE CHRISTOPHE

1 patent
US8786830B2Jul 22, 2014

Immersion lithographic apparatus including a pressure sensor to measure pressure of the immersion liquid and a device manufacturing method

DE METSENAERE CHRISTOPHE2 citations53

KAMIDI RAMIDIN IZAIR

1 patent
US8279407B2Oct 2, 2012

Stage system and lithographic apparatus comprising such stage system

KAMIDI RAMIDIN IZAIR1 citations47

DE VOS YOUSSEF KAREL MARIA

1 patent
US8830442B2Sep 9, 2014

Servo control system, lithographic apparatus and control method

DE VOS YOUSSEF KAREL MARIA0 citations30