Inventor
KASANAMI KATSUHISA
JP6 patents
⚠️ This page may combine multiple inventors who share the name “KASANAMI KATSUHISA”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
HITACHI INT ELECTRIC INC
3 patentsUS6483989B1Nov 19, 2002
Substrate processing apparatus and semiconductor device producing method
HITACHI INT ELECTRIC INC551 citations97
US7842160B2Nov 30, 2010
Semiconductor producing device and semiconductor device producing method
HITACHI INT ELECTRIC INC5 citations60
US6541344B2Apr 1, 2003
Substrate processing apparatus and semiconductor device manufacturing method
HITACHI INT ELECTRIC INC1 citations51