Inventor

PARK SONG HWAN

KR3 patents

⚠️ This page may combine multiple inventors who share the name “PARK SONG HWAN”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

EUGENE TECHNOLOGY CO LTD

1 patent

US10392702B2Aug 27, 2019

Substrate processing apparatus

EUGENE TECHNOLOGY CO LTD5 citations68

SK HYNIX INC

1 patent

US12392554B2Aug 19, 2025

Apparatus for processing a substrate and method of operating the same

SK HYNIX INC0 citations44

JE SUNG TAE

1 patent

US9416451B2Aug 16, 2016

Substrate processing device equipped with semicircle shaped antenna

JE SUNG TAE0 citations32