Inventor

CHENG SHIH-YUAN

US4 patents

⚠️ This page may combine multiple inventors who share the name “CHENG SHIH-YUAN”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

LAM RES CORP

3 patents

US6977184B1Dec 20, 2005

Method and apparatus for nitride spacer etch process implementing in situ interferometry endpoint detection and non-interferometry endpoint monitoring

LAM RES CORP13 citations78

US9466502B2Oct 11, 2016

Line width roughness improvement with noble gas plasma

LAM RES CORP3 citations71

US9263284B2Feb 16, 2016

Line width roughness improvement with noble gas plasma

LAM RES CORP3 citations71

CHENG SHIH-YUAN

1 patent

US8753804B2Jun 17, 2014

Line width roughness improvement with noble gas plasma

CHENG SHIH-YUAN5 citations77