Inventor
HONG YOUN GI
US5 patents
⚠️ This page may combine multiple inventors who share the name “HONG YOUN GI”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
LAM RES CORP
4 patentsUS9881788B2Jan 30, 2018
Back side deposition apparatus and applications
LAM RES CORP372 citations97
US9466502B2Oct 11, 2016
Line width roughness improvement with noble gas plasma
LAM RES CORP3 citations71
US9263284B2Feb 16, 2016
Line width roughness improvement with noble gas plasma
LAM RES CORP3 citations71
US12057295B2Aug 6, 2024
RF power compensation to reduce deposition or etch rate changes in response to substrate bulk resistivity variations
LAM RES CORP0 citations53