Inventor
PAN CHIEN-HSUN
TW5 patents
Patents
5 patentsUS10844477B2Nov 24, 2020
Electromagnetic module for physical vapor deposition
TAIWAN SEMICONDUCTOR MFG CO LTD3 citations71
US11396695B2Jul 26, 2022
Electromagnetic module for physical vapor deposition
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations60
US12104268B2Oct 1, 2024
Treatment system and method
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations57
US11732379B2Aug 22, 2023
Treatment system and method
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations57
US10345254B2Jul 9, 2019
Detection method for electroplating process
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations38